JPS623385B2 - - Google Patents

Info

Publication number
JPS623385B2
JPS623385B2 JP51011985A JP1198576A JPS623385B2 JP S623385 B2 JPS623385 B2 JP S623385B2 JP 51011985 A JP51011985 A JP 51011985A JP 1198576 A JP1198576 A JP 1198576A JP S623385 B2 JPS623385 B2 JP S623385B2
Authority
JP
Japan
Prior art keywords
wafer
probe
transistor
center conductor
ground
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51011985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5295182A (en
Inventor
Junichi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1198576A priority Critical patent/JPS5295182A/ja
Publication of JPS5295182A publication Critical patent/JPS5295182A/ja
Publication of JPS623385B2 publication Critical patent/JPS623385B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1198576A 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer Granted JPS5295182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1198576A JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1198576A JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Publications (2)

Publication Number Publication Date
JPS5295182A JPS5295182A (en) 1977-08-10
JPS623385B2 true JPS623385B2 (en]) 1987-01-24

Family

ID=11792877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1198576A Granted JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Country Status (1)

Country Link
JP (1) JPS5295182A (en])

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4697143A (en) * 1984-04-30 1987-09-29 Cascade Microtech, Inc. Wafer probe
JPS6221068A (ja) * 1985-07-19 1987-01-29 Koichi Yoshida フラツト形探針
FR2592175B1 (fr) * 1985-12-20 1988-02-12 Labo Electronique Physique Dispositif de test pour pastille de circuit integre hyperfrequences
FR2592176B1 (fr) * 1985-12-20 1988-02-12 Labo Electronique Physique Dispositif de test pour boitier sans broches muni d'une pastille de circuit integre hyperfrequences
JPH0690222B2 (ja) * 1986-01-31 1994-11-14 田中貴金属工業株式会社 半導体ウエ−ハの電気的特性測定用プロ−ブ針
JPS62177455A (ja) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk 半導体ウエ−ハの電気的特性測定用プロ−ブ針
JPH0740577B2 (ja) * 1987-04-21 1995-05-01 東京エレクトロン株式会社 プロ−ブカ−ド
TW202505204A (zh) * 2023-07-28 2025-02-01 旺矽科技股份有限公司 接觸探針及其接觸件、接觸件的製造方法、使用該接觸件的探針系統、未封裝半導體裝置之測試方法、經測試之半導體裝置及其製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3911361A (en) * 1974-06-28 1975-10-07 Ibm Coaxial array space transformer

Also Published As

Publication number Publication date
JPS5295182A (en) 1977-08-10

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